Improved PECVD processed hydrogenated germanium films through temperature induced densification

نویسندگان

چکیده

Amorphous and nano-crystalline germanium is of potential interest for a wide range electronic, optical, opto-electronic photovoltaic applications. In this work the influence deposition temperature on hydrogenated (Ge:H) films was characterized, using over 200 Ge:H 70 SiGe:H films. The demonstrated temperature-induced densification resulted in more stable with lower bandgap energy dark conductivity higher activation energy.

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ژورنال

عنوان ژورنال: Materials Science in Semiconductor Processing

سال: 2022

ISSN: ['1873-4081', '1369-8001']

DOI: https://doi.org/10.1016/j.mssp.2021.106285